STMicroelectronics LPS25H MEMS 压力传感器

STMicroelectronics LPS25H MEMS 压力传感器是超紧凑的压阻式绝对压力传感器。它包含一个单片传感元件和一个 IC 接口,该接口能从传感元件接收信息,并能向外部提供数字信号。该传感元件包括一个在单晶硅基板上制作的悬浮薄膜。它能检测绝对压力,通过 ST 开发的专门工艺制造而成。与传统微加工技术制作的薄膜相比,该薄膜要小很多。一个原生机械挡块起到防止薄膜破裂的作用。IC 接口采用标准 CMOS 制造工艺,可实现高集成度,精确地调节接口电路,使其与传感元件的特性匹配。

The membrane is very small compared to the traditionally built silicon micromachined membranes. Membrane breakage is prevented by an intrinsic mechanical stopper. The IC interface is manufactured using a standard CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the sensing element characteristics.

特性

  • 260 to 1260hPa absolute pressure range
  • High-resolution mode
  • LPS25H - 1Pa RMS
  • LPS25HB - 0.01hPa RMS
  • Low power consumption
  • LPS25H & LPS25HB - Low resolution mode: 4μA
  • LPS25H - High resolution mode: 25μA
  • LPS25HB - Low current & noise mode with FIFO: 4.5μA
  • High overpressure capability: 20x full scale
  • Embedded temperature compensation
  • Embedded 24-bit ADC
  • Selectable ODR from 1Hz to 25Hz
  • SPI and I2C interfaces
  • Embedded FIFO
  • Supply voltage: 1.7 to 3.6V
  • High shock survivability: 10,000g
  • ECOPACK® lead-free compliant

应用

  • Altimeter and barometer for portable devices
  • GPS applications
  • Weather Station Equipment
  • Sport Watches

Block Diagram

STMicroelectronics LPS25H MEMS 压力传感器
发布日期: 2014-03-13 | 更新日期: 2022-03-11